Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester
This paper presents the methodology and challenges experienced in the microfabrication, packaging, and integration of a fixed-fixed folded spring piezoelectric energy harvester.A variety of challenges were overcome chocolate chip cookie purse in the fabrication of the energy harvesters, such as the diagnosis and rectification of sol-gel PZT film qu